Characteristics of ZnO nanorods grown by atmospheric pressuremetal-organic chemical vapor deposition

• Main Authors: Hsin-Yi Hsieh, 謝欣宜
• Other Authors: Wu-Yih Uen
• Format: Others
• Language: en_US
• Published: 2010
• Online Access: http://ndltd.ncl.edu.tw/handle/59358066984965992152

碩士 === 中原大學 === 電子工程研究所 === 98 === Abstract In recent years, one–dimensional (1D) ZnO structures have become the focus of intensive research because their sizes range between the clusters and the macro-particle, which is possible to show small size effect of nanomaterials, surface effects and quantum-mechanic effects and can be expected for wide applications in nanoscale optoelectronic devices. In this study, high-quality ZnO nanorods were successfully fabricated by atmospheric pressure metalorganic chemical vapor deposition technique using AlN as the buffer layer. The growth of ZnO nanorods was conducted without any catalyst. Influences of various growth conditions on the growth mechanism, morphology, structure and optical properties of the nanorods fabricated were examined. Experimental results show that the column diameter of ZnO nanorods is resolved by the VI/II gas flow ratio of ZnO used, while the morphology of nanorods is dependent on the V/III gas flow ratio employed for AlN buffer layer. As for the optical properties, only UV emissions with the energies near the bandgap of ZnO was observed from the nanorods fabricated, illustrateing the good quality of materials. In particular, the UV emission from the specimen fabricated at 500℃ demonstrates a blue-shift phenomenon, which is suggested to feature the quantum confinement effect of carriers in the ZnO nanostructure fabricated.