Research of Application the Microlens Fabrication Technology for the Miniaturization of Chromatic Dispersion Module

• Main Authors: Yi-Ko Chen, 陳宜課
• Other Authors: Kuo-Yung Hung
• Format: Others
• Language: zh-TW
• Published: 2010
• Online Access: http://ndltd.ncl.edu.tw/handle/20920335796741550913

碩士 === 明志科技大學 === 機電工程研究所 === 99 === The purpose of this thesis is to provide a new design, fabricate concepts of the miniature chromatic dispersion module with 2mm (450-750 nm) focal shift, the major components are integrated within 101 mm long by use of Micro-opto-electro-mechanical systems (MOEMS). The chromatic dispersion module is application to achieve real-time surface topography measurement and high vertical resolution of the target. And the module could be batch fabricated, inexpensive and that can be arrayed for various parallel imaging applications. We present a method of achieving these purposes by stacking microfabricated optical components in the vertical direction. It has the advantages in alignment and integration, since the optical path is passed through two substrates. The system design is based on the principle of afocal transmissive, stacked and refractive type. White light source was used in the system and the module could have 10 μm spot size after the light through the 10X/0.25 objective lenses at individual wavelength (450-750 nm). The micro dispersion module could achieve the specifications: z-axis range of measurement ± 1 mm, the spot size of the system less than 10μm and the module size is less than 101 mm ( not including microscope objectives). If this system could realize, as a result of its long chromatic dispersion distance, causes the system could linearity operating at the region not to need the mechanical vertical scanning.