Analysis, Design and Control of a Single-Degree of Freedom Piezoelectric Compliant Stage with Amplification Mechanisms
碩士 === 國立成功大學 === 機械工程學系碩博士班 === 98 === Automatic Optical Inspection (AOI) plays an important role on modern semiconductor and optoelectronics industries. A typical AOI equipment consists of a camera mounted on a gantry for performing large-area inspection. Fast and accurate maneuver would influence...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/89082958686838461862 |