| Summary: | 碩士 === 國立成功大學 === 機械工程學系碩博士班 === 98 === The purpose of this thesis is to design and manufacture piezo-stage, additionally, this thesis focus on control the piezo-stage such that can be achieved precision positioning. Positioning error in piezo-stage occurs due to the hysteresis effect of piezo actuator, and the vibration effect especially when the stage is operated at high frequency. Therefore, in this thesis, the feedforward control based on Preisach model was used to compensate for hysteresis effect. Moreover, H∞ control and the optimal inversion based feedforward control were implemented to compensate for vibration effect. Experiment results showed that, the proposed control method can improve the tracking performance and achieve precision positioning.
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