Analysis ans Simulation for Silicon Nanowire Biosensors

• Main Authors: Lu,Kun-Yen, 呂昆諺
• Other Authors: Su, Pin
• Format: Others
• Language: en_US
• Published: 2009
• Online Access: http://ndltd.ncl.edu.tw/handle/78022223936419794090

碩士 === 國立交通大學 === 電子工程系所 === 98 === This thesis provides a comprehensive simulation framework for silicon nanowire (Si-NW) biosensors. Using this simulation framework, we have systematically investigated the impact of device design on the sensitivity of Si-NW biosensors. In addition, we have examined the impacts of intrinsic parameter fluctuations such as random dopant fluctuations (RDF) and line-edge roughness (LER). Our study indicates that Si-NW biosensors with smaller diameter, shorter channel length, and lower channel doping have better sensitivity and less sensitivity variation. When diameter is smaller than ~10nm, the quantum effect further enhances the sensitivity. Regarding the suppression of screening effects, our simulations indicate that the electro-diffusion flow can significantly suppress the screening effects in the electrolyte solution, and Si-NW biosensors with lower channel doping and smaller diameter have more enhancements in the sensitivity, especially for the accumulation mode. Besides, the structure of Si-NW biosensor with antenna has been simulated and analyzed.