Characteristics of Raman Spectra of Hydrogenated Amorphous Carbon Films
碩士 === 國立中央大學 === 光電科學研究所 === 98 === In this thesis,we use mainly the Raman spectroscopy and UV-VIS-NIR spectroscopy to study the characteristics of hydrogenated amorphous carbon thin films which are made by the Plasma Enhanced Chemical Vapor Deposition (PECVD) method. These films were made in diffe...
Main Authors: | Ita Wang, 王一大 |
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Other Authors: | Cheng-Chung Lee |
Format: | Others |
Language: | zh-TW |
Published: |
2010
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Online Access: | http://ndltd.ncl.edu.tw/handle/33442263575533392714 |
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