| Summary: | 碩士 === 國立高雄第一科技大學 === 環境與安全衛生工程所 === 98 === Chemicals used in a wide range of Semiconductor industries, the quick variations of processing and the used chemicals as confidential for advanced technologic, and therefore how to be effective dispose exhaust by advanced technologic will more challenge. The different materials used in different processes, and no matter the categories or chemical characteristics for emitted exhausts are all different, the different disposal equipment and analysis technology according with the different emitting characteristic.
This case study is focusing on emitted characteristics in exhaust, Acid-Alkali, of semiconductor process disposal by Scrubber. To analyze the composition in exhausts, Acid-Alkali, according to the know-how of semiconductor process. The further analysis is in progress under regulations. After these materials emitted and mixed, through Scrubber to dispose and study the emitting condition and benefit. To sample exhausts by Impinger and analyze the concentration of emitted exhausts in Semiconductor process. For the emitted exhausts by Scrubber disposal, adjust the operating criteria of Scrubber (Recycle Water Quality, pH of washing fluid and the packing of larger specific area) under the requirements of environmental regulations. Sampling analysis in before and after concentration and observe the changes in process efficiency to enhance capacity of current equipment processing.
The concentration is an important index for judgment in the experiment observation. The value is for reference only if the concentration too low, and therefore this study is discuss the remove ratio of hydrofluoric acid is raised from 30% to 78% only. This shows it will be helpful for remove ratio if use the high quality water to be recycle water. The remove ratio of hydrofluoric acid is also raised from 30% to 78% if use the packing of larger specific area, and therefore to replace packing will be the workable way. To change the pH of washing fluid, the remove ratio of hydrofluoric acid is raised from 65% to 90%, and this is the most easy way to change criteria for operation. These above three kinds of changes in operating condition are valid.
|
|---|
