Emission Characteristics of Semiconductor Process Exhaust Treated by a Scrubber
碩士 === 國立高雄第一科技大學 === 環境與安全衛生工程所 === 98 === Chemicals used in a wide range of Semiconductor industries, the quick variations of processing and the used chemicals as confidential for advanced technologic, and therefore how to be effective dispose exhaust by advanced technologic will more challenge. T...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/61112603253102218530 |