Grain Growth and Mechanical Properties of Nanocrystalline Mo and Zr Thin Films
碩士 === 國立中山大學 === 材料與光電科學學系研究所 === 98 === In this study, the mechanical properties of nanocrystalline Mo and Zr thin films are examined. The specimens of nanocrystalline Mo and Zr thin films were all fabricated by DC magnetron sputtering at various temperatures. These specimens were annealed in RTA...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2010
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/21567946783649393706 |