| Summary: | 碩士 === 國立中山大學 === 電機工程學系研究所 === 98 === As working time increases for most people, dining out and staying up late is inevitable, resulting in bad health conditions. The concentrations of calcium and sodium ion in human blood not only respond directly to health conditions, but can also obtain symptoms of different diseases by observing it. This shows that the concentrations of calcium and sodium ion in human blood are an important index of health.
In order to manufacture disposable ion sensor and make it easy to measure, this study uses extended gate field effect transistor (EGFET) with an ion selective membrane(ISM) on top of the gate sensitive layer to replace traditional ion sensitive field effect transistor (ISFET). The ISM adsorbs the appointed ion by means of ion selective medicament which is covered by a macromolecule. The main processing steps of the extended gate field effect transistor developed in this study involve at least four photolithographic and two thin-film deposition processes. The influence of the channel’s width to length ratio, the design of channel, the area of the gate sensitive layer, the energy and dose of ion implantation used for the transistor and ion sensor were investigated.
Based on the measurement results of the ion sensor, a sensitivity of 40mV/decade with linearity of 98.589 % is measured for calcium ion concentration in human blood ranging from 5 × 10-3 mol/L to 5 × 10-4 mol/L. On the other hand, a sensitivity of 56 mV/decade with linearity of 98.589 % is measured for sodium ion concentration in human blood ranging from 1 mol/L to 10-1 mol/L.
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