Study of Disposable EGFET-based Hydrogen and Potassium Micro Ion Sensors

• Main Authors: Chih-Han Chang, 張志翰
• Other Authors: I-Yu Huang
• Format: Others
• Language: zh-TW
• Published: 2010
• Online Access: http://ndltd.ncl.edu.tw/handle/80039817528782549496

碩士 === 國立中山大學 === 電機工程學系研究所 === 98 === In recent years, as biological information analysis technology rapidly develops in hematology, biochemistry and microbiology areas, demand for portable measurement systems become more and more important. This study makes efforts in developing disposable hydrogen and potassium ion sensor and microsystem for analysis application. The measured ion concentration data by this analysis microsystem provide people a judgement on their health condition, and furthermore an important reference for medical treatment for patients. There are several advantages in using IC or MEMS technology to manufacture portable measurement system, the advantages are down-scaling, short reaction time, trace chemical analysis, low power dissipation, and low cost. So the thesis uses extended gate field effect transistor, in order to measure multiple ions at the same time, multiple transistors are manufactured on the same chip with an ion selective membrane on top of the gate sensitive layer. This allows the measurement result of the multiple ion be shown at the same time. The main processing steps of the ion sensor developed in this study involve at least four photolithographic and three thin-film deposition processes. Based on the measurement result, the hydrogen ion sensor’s sensitivity is 30.7 mV/decade for a sensing range pH1 ~ pH13. The sensitivity of the potassium ion sensor is 11.5 mV/decade for a sensing range 10-1M to 10-3M.