Fabrication of Si-based Suspending Antenna by Bulk-micromachining and Surface-micromachining Technologies

• Main Authors: Kuo-Yi Hsu, 徐國益
• Other Authors: I-Yu Huang
• Format: Others
• Language: zh-TW
• Published: 2010
• Online Access: http://ndltd.ncl.edu.tw/handle/39492731827125651042

碩士 === 國立中山大學 === 電機工程學系研究所 === 98 === For the application of 802.11a wireless communication system, this thesis aims to develop a novel suspending antenna with periodic structures to reduce electromagnetic wave from substrate using electrochemical deposition, surface micromachining and bulk micromachining technologies. This research presents two particular structures to increase the bandwidth and the radiation efficient and to reduce the return loss of the antenna, including: (i) the optimum design of periodic structures to restrain electromagnetic wave from substrate and to reduce the return loss of the antenna. To reduce the effective dielectric constant of the silicon substrate and to increase the bandwidth of the antenna, anisotropic etching the backside of the silicon substrate formed regular cavities using bulk-micromachining technology, (ii) to utilize a suspending structure to reduce the power loss through the substrate and to confirm the result using high frequency simulator. The implemented Si-based suspending antenna with periodic structures were characterized by a commercial network analyzer under 1~8 GHz testing frequency range. All the bandwidth and the return loss of the antenna proposed in this thesis are extracted by the commercial simulation software. Based on the measurement results, the center frequency is equal to 4.85 GHz, the return loss is around -35.5 dB and the bandwidth is equal to 42.9% (3.75~5.8 GHz). Eventually, this thesis successfully develops a low-loss and broadband antenna with novel structures using high frequency simulator and MEMS technologies for 802.11a wireless communication system.