Integration and Implementation of CMOS-MEMS Microaccelerometer and low-noise Capacitive Sensing Circuits
碩士 === 國立清華大學 === 動力機械工程學系 === 98 === This study presents a capacitance sensing circuit with low noise and tuned-sensitivity by integrating an in-plane microaccelerometer, included one-axis and dual-axis sensors. The dual-axis microaccelerometer is monolithic using single proof-mass to sense in-plan...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/37205616657133595315 |
| Summary: | 碩士 === 國立清華大學 === 動力機械工程學系 === 98 === This study presents a capacitance sensing circuit with low noise and tuned-sensitivity by integrating an in-plane microaccelerometer, included one-axis and dual-axis sensors. The dual-axis microaccelerometer is monolithic using single proof-mass to sense in-plane directions. The interface of microaccelerometer is fully-differential which is capable of reducing common-mode noise and offering higher resolution. Futhermore, this work constructs a noise model to study how to suppress the noise which influences the sensitive signal effectively. The microstructure and the capacitive sensing circuit were fabricated through tsmc 0.35 μm mixed-signal 2P4M polycide 3.3/5 V process. As a result, the microstructure with one-axis sensing is successfully integrating with capacitive sensing circuit. Experimental results showed that the whole chip sensitivity measurement is 6.1 mV/g.
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