Integration and Implementation of CMOS-MEMS Microaccelerometer and low-noise Capacitive Sensing Circuits
碩士 === 國立清華大學 === 動力機械工程學系 === 98 === This study presents a capacitance sensing circuit with low noise and tuned-sensitivity by integrating an in-plane microaccelerometer, included one-axis and dual-axis sensors. The dual-axis microaccelerometer is monolithic using single proof-mass to sense in-plan...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/37205616657133595315 |