A Study of Integrate Amplifier and Pyroelectric Infrared Sensor
碩士 === 國立臺灣海洋大學 === 電機工程學系 === 98 === In this experiment, radio frequency magnetron sputter deposition is used to deposit pyroelectric Lead Calcium Titanate Pb0.7Ca0.3TiO3 (PCT) thin film on silicon substrate and to prepare integrated pyroelectric thin film infrared sensor device. Meanwhile, TSMC 0....
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/66137439604101126751 |