Study on All Sputtering Processed Low Temperature Polycrystalline Silicon/Germanium Thin Film Transistors
博士 === 國立臺灣科技大學 === 電子工程系 === 98 === The low temperature sputtering deposition technologies of SiO2 gate insulator and poly-Si films were developed for the fabrication of TFTs on plastic substrates. Besides, the super lateral growth (SLG) of germanium films was realized by excimer laser annealing (E...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/40149610218357135883 |