Gas sensitivity of SnO2 thin films at various temperatures
碩士 === 聖約翰科技大學 === 自動化及機電整合研究所 === 98 === Gas sensitive analysis of SnO2 thin films deposited by RF sputtering is presented in this work. A 100 nm SiO2 insulated film is sputtered on the silicone substrate (2×2 cm), and a Cu electrode film is evaporated on the top. Various 40, 60 and 80 nm SnO2 film...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/64780067942128241960 |