Investigation on optimizing fabrication parameters of ZnO:Ga transparent conductive films by sol-gel method and infarred heating
碩士 === 南台科技大學 === 機械工程系 === 98 === In this study, ZnO:Ga(Al) thin films were deposited by sol-gel method. Using RTA as pre-annealing treatments, and TF as the post-annealing treatments, we intend to find the optimum parameters. In order to obtain better zinc oxide films and to improve the electrical...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/50091727119089138633 |