Depositing the Carbon Nanoflakes on Stainless Steel by RF Magnetron Sputtering for Electron Field Emission Application

• Main Authors: Hsuan-chen Chang, 張軒誠
• Other Authors: Wen-Ching Shih
• Format: Others
• Language: zh-TW
• Published: 2010
• Online Access: http://ndltd.ncl.edu.tw/handle/00937232672235932322

碩士 === 大同大學 === 光電工程研究所 === 98 === In this study, we fabricated the carbon nanoflakes (CNFs) on stainless steel by radio-frequency magnetron sputtering system. Lots of CNFs with thickness of less than 5-10 nm interlaced together to form a layer of carbon nest-like film with their sharp edges perpendicular to the substrate. The effects of deposition parameters on the structure and properties of CNFs were also investigated. A growth mechanism has been proposed that observed structure of these CNFs resulting from the interaction of temperature、RF power and different growth gas species. From the application points of view, the free-standing and vertically oriented CNFs with a very high aspect ratio and sharp edges could serve as an efficient edge emitter for electron field emission. For the diode structure, the gap between anode and cathode is 100 μm, and the turn-on electric field can reach to 2.5 V/μm while current density is 1 μA/cm2. The current density can reach to 2 mA/cm2 under 5 V/μm.The lifetime of the CNFs was improved from 3.87 to 6.32 hours.