Low temperature preparation of transparent conductive indium-tin oxide thin films by solvothermally synthesized indium-tin oxide nano-slurry

• Main Authors: Chih Wei Mao, 毛植葳
• Other Authors: H. C. Lu
• Format: Others
• Published: 2011
• Online Access: http://ndltd.ncl.edu.tw/handle/02850688264173494177

碩士 === 長庚大學 === 化工與材料工程學系 === 99 === The objective of this research was to prepare nano-crystalline ITO powders by combining coprecipitation process with solvothermal process without the procedure of calcination. In addition, the effects of both the coprecipitation process and the solvothermal process on the characteristics of ITO nano-powders were also investigated. These solvothermally synthesized ITO nano-powders were then used to prepare ITO conductive slurry by adjusting suitable dispersant. Finally, transparent conductive ITO thin films ㄍdeposited on glass substrates by spin coating the glass substrates with the ITO slurry and by subsequent heat treatment in low temperature. From the experimental results, single-phased nano-crystalline ITO powders could be directly synthesized by this novel solvothermal process. It was also shown that the crystallinity of coprecipitated precursors played decisive roles in whether single-phased cubic structured nano-crystalline ITO powders could be synthesized. The cubic ITO nano-powders could be synthesized by solvothermally treated the amorphous coprecipitate precursor. Finally, by dispersing the nano-crystalline ITO powders synthesized from using methanol as solvent and adding dispersant Disperbyk-2015, stable ITO conductive coating slurry with 30wt% ITO solid content was obtained. After spin-coating two times with the ITO conductive coating solutions and drying the resulting thin films at 140℃ for 30 minutes, ITO thin film with sheet resistance of 1.9×105Ω/sq and visible transmittance above 90% were obtained.