The Study of SnO2 Thin Films by Nano Vapor Deposition

• Main Authors: YAN,JYUN-KAI, 嚴浚凱
• Other Authors: HSU,NENG-JYE
• Format: Others
• Language: zh-TW
• Published: 2011
• Online Access: http://ndltd.ncl.edu.tw/handle/83041842982677534053

碩士 === 中華科技大學 === 電子工程研究所碩士班 === 99 === In this study, the Nano-Ink made by Tin Dioxide (SnO2) nanoparticles was prepared by Sol-Gel Route and sprayed on the Soda-Lime Glass (SLG) substrates. Then we tried to study the surface morphology by SEM and XRD measurements. The Nano-Ink was prepared by ultrasonic vibration and sprayed on the substrates under these conditions: (1)Liquid flow rate 1 mL/min, (2)Gas flow rate 10 L/min, (3)Spraying height of 225 mm, (4)The substrates in 400 ℃ of temperature and underwent respectively sparying 4, 6 and 8 times. Then we discuss the different deposition characteristics in each thickness. Those samples didn’t go through the thermal process, the substrate temperature is 400 ℃, we found that the surface of samples which was sprayed with 4 and 8 times of Nano-Ink were cracking severly, and the quality of deposition was un-uniform. The samples with 6 times of Nano-Ink were mildly cracking, and the deposition uniformity was better. Then the three groups of samples underwent thermal process with 450 ℃, 500 ℃ and 550 ℃. The result showed that the cracking condition of the samples was improved after thermal process. Moreover, we found that the group which underwent 550 ℃ thermal process appeared some crystalline formation on the surface of the substrates, and the surface structure was most solid, and appeared with less pore. The XRD measurement results showed the angle of diffraction peak was about 26.5 degrees, and the crystal surface is (110). In addition, the temperature of substrates would affect the drying speed of the Nano-Ink sprayed on the substrate. Therefore, the substrates with the temperature of 300 ℃ respectively spraying 4,6 and 8 times of Nano-Ink and underwent thermal process was compared with those samples we discussed above. After the comparison, we found that the substrates with the temperature of 300℃ sprayed with 6 times of Nano-Ink and underwent 450 ℃ thermal process provided the best outcomes.