| Summary: | 碩士 === 大葉大學 === 電機工程學系 === 99 === In this study, LaTiO3 thin films were grown on the LaAlO3(001), SrTiO3(001) DyScO3(110), and GaScO3(110) substrates by the off-axis RF magnetron co-sputtering system. We discussed the lattice strain characteristics of the lanthanum titanate thin films epitaxially deposited on various substrates. In the experiments, we used the powder X-ray diffraction (XRD) to analyze the crystal structure and the growth direction of the epitaxial films, and the Φ scan to verify the in-plane arrangement of the films. The temperature dependence of resistivity was measured to study the transport properties of the films grown on various substrates. Finally, the residual stresses in LTO thin films deposited on various substrates were determined using the sin2Ψ method, and the influences of lattice strains were discussed.
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