Studies of XRD Φ Scan and Strains of Lanthanum Titanate Epitaxial Films on Various Substrates
碩士 === 大葉大學 === 電機工程學系 === 99 === In this study, LaTiO3 thin films were grown on the LaAlO3(001), SrTiO3(001) DyScO3(110), and GaScO3(110) substrates by the off-axis RF magnetron co-sputtering system. We discussed the lattice strain characteristics of the lanthanum titanate thin films epitaxially de...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2011
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| Online Access: | http://ndltd.ncl.edu.tw/handle/17226388094691315497 |