Study on the properties of Aluminum-induce crystallized microcrystalline silicon thin films for solar cell application

Study on the properties of Aluminum-induce crystallized microcrystalline silicon thin films for solar cell application

碩士 === 中興大學 === 光電工程研究所 === 99 === In this research, we mainly investigated the influence of Aluminum-induced crystallization(AIC) on Silicon thin film as a material for solar cell. We fabricated microcrystalline Silicon thin film by Aluminum-induced crystallization therefore we could further discus...

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Main Authors: Hui-Mu Chou, 周暉穆
Other Authors: Zingway Pei
Format: Others
Language:zh-TW
Published: 2011
Online Access:http://ndltd.ncl.edu.tw/handle/53520846637617550249
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spelling ndltd-TW-099NCHU51240092015-10-13T20:18:50Z http://ndltd.ncl.edu.tw/handle/53520846637617550249 Study on the properties of Aluminum-induce crystallized microcrystalline silicon thin films for solar cell application 鋁誘發再結晶法製備太陽能電池用之微晶矽薄膜之研究 Hui-Mu Chou 周暉穆 碩士 中興大學 光電工程研究所 99 In this research, we mainly investigated the influence of Aluminum-induced crystallization(AIC) on Silicon thin film as a material for solar cell. We fabricated microcrystalline Silicon thin film by Aluminum-induced crystallization therefore we could further discuss the effects of crystallinity of Silicon thin film by different parameters, such as annealing time、thickness of Silicon thin film and Aluminum. In addition, we discuss the effects of Silane(SiH4) flow during deposition on electrical properties and microstructure of the microcrystalline Silicon thin film. So we can consider whether it would be proper for solar cell after optic and electric measurement. Zingway Pei 裴靜偉 2011 學位論文 ; thesis 52 zh-TW
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language zh-TW
format Others
sources NDLTD
description 碩士 === 中興大學 === 光電工程研究所 === 99 === In this research, we mainly investigated the influence of Aluminum-induced crystallization(AIC) on Silicon thin film as a material for solar cell. We fabricated microcrystalline Silicon thin film by Aluminum-induced crystallization therefore we could further discuss the effects of crystallinity of Silicon thin film by different parameters, such as annealing time、thickness of Silicon thin film and Aluminum. In addition, we discuss the effects of Silane(SiH4) flow during deposition on electrical properties and microstructure of the microcrystalline Silicon thin film. So we can consider whether it would be proper for solar cell after optic and electric measurement.
author2 Zingway Pei
author_facet Zingway Pei
Hui-Mu Chou
周暉穆
author Hui-Mu Chou
周暉穆
spellingShingle Hui-Mu Chou
周暉穆
Study on the properties of Aluminum-induce crystallized microcrystalline silicon thin films for solar cell application
author_sort Hui-Mu Chou
title Study on the properties of Aluminum-induce crystallized microcrystalline silicon thin films for solar cell application
title_short Study on the properties of Aluminum-induce crystallized microcrystalline silicon thin films for solar cell application
title_full Study on the properties of Aluminum-induce crystallized microcrystalline silicon thin films for solar cell application
title_fullStr Study on the properties of Aluminum-induce crystallized microcrystalline silicon thin films for solar cell application
title_full_unstemmed Study on the properties of Aluminum-induce crystallized microcrystalline silicon thin films for solar cell application
title_sort study on the properties of aluminum-induce crystallized microcrystalline silicon thin films for solar cell application
publishDate 2011
url http://ndltd.ncl.edu.tw/handle/53520846637617550249
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