| Summary: | 碩士 === 中興大學 === 材料科學與工程學系所 === 99 === Camphor is a natural carbon source, which is non-toxic, harmless to human body, and low cost. Besides, camphor has saturated carbon-hydrogen bonds including methyl groups, pentagon carbon rings, and aromatic carbon rings, and thus, it is often used as a carbon source .This study investigates the effects of camphor’s weights and deposition temperature of carbon films prepared by thermal chemical vapor deposition (CVD). Four kinds of camphor with the weights of 0.06g, 0.13g 0.3g, and 0.5g were heated at a temperature of 200℃, and then, 30 sccm argon was used to carry the camphor vapor to flow into the deposition zone of thermal CVD. The deposition temperatures were set to 825℃, 850℃, 875℃, 900℃, and 925℃. The surface morphology, thickness, microstructure, surface property, and electrical property of carbon films were investigated by Tabletop Microscope, Surface Profiler, X-ray photoelectron spectrometer, X-ray diffraction spectrometer , Raman scattering spectrometer, atomic force microscopy, contact angle meter , and Four-point probe method. Besides, this study also investigates photoelectric conversion efficiency of carbon films prepared by adding ammonia (NH3) in camphor, and discusses its feasibility for solar cells.
Experimental results indicate that the soot increases as the camphor weight increases. The thickness and sp2 carbon atoms of carbon films increase with increasing the deposition temperature while the mean crystallite size (Lc), the degree of ordering, in-plane crystallite size (La), and electrical resistivity decrease.
The surface roughness of carbon films with weight of camphor being 0.3g and 0.5g are rougher than that being 0.06g and 0.13g. Besides, the water contact angle of carbon films become very large with weight of camphor being 0.3g and 0.5g, which is affected by carbon soot .After adding NH3, the electrical resistivity decreases as deposition temperature increases. Moreover, photoelectric conversion efficiency is much affected by carbon films thicknesses.
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