Profilometry of spherical lens using flash interferometry

• Main Authors: Chun-Hung Song, 宋俊宏
• Other Authors: 李吉群
• Format: Others
• Language: zh-TW
• Published: 2011
• Online Access: http://ndltd.ncl.edu.tw/handle/26452047685312807509

碩士 === 國立中興大學 === 機械工程學系所 === 99 === The spherical lens elements have played an important role in the applications of current optical products up to now. Therefore, it is significant for the performance of the entire optical systems to enhance the detection of the surface profile of the spherical lens and to improve the manufacturing precision of the optical systems. After several years’ development in techniques for the measurement of the surface profile of the spherical lens, the phase shifting methods have commonly been used in high precision measurement. However, there are some obstacles to the methods because environmental noise prohibits conventional phase shifting methods. Therefore, I adopted the instantaneous interference methods to measure the surface profile of the spherical lens and to accomplish the objectives of making high precision measurement of the surface profile of the spherical lens. Used the Fizeau interferometry to capture single interference fringes and used the Fourier interferometer techniques to reconstruct the surface topography contours. By comparing the results with the results I got by using the ZYGO interferometer, I found that the first results are similar to the second results. As a result, the feasibility of the experimental architecture was verified.