Ultrasonic Vibration and Water-Jet Assisted Diamond Disk Dressing Characteristic of CMP Polishing Pad

碩士 === 國立勤益科技大學 === 機械工程系 === 99 === This study introduces an ultrasonic, vibration-assisted, chemical mechanical polishing (UV-CMP) method to improve the fabrication process and machining efficiency and an ultrasonic, vibration-assisted, diamond disk (UV-DD) method to enhance the diamond work numbe...

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Bibliographic Details
Main Authors: Wei-Zheng Yang, 楊緯政
Other Authors: Ming-Yi Tsai
Format: Others
Language:zh-TW
Published: 2011
Online Access:http://ndltd.ncl.edu.tw/handle/66594057681439110536

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