A study on the microstructure and electrical properties of Ta-Ti-N nanocomposite thin films by reactive sputtering
碩士 === 國立成功大學 === 機械工程學系碩博士班 === 99
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2011
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| Online Access: | http://ndltd.ncl.edu.tw/handle/51539372886269149798 |