A Study on the Fabrication, Characterization, and Modeling of a Novel Device with a Suspended Nanowire Channel
碩士 === 國立交通大學 === 電子研究所 === 99 === In this thesis, we have fabricated and studied the suspended-nanowire (NW)-channel TFTs. The devices use the sidewall-spacer etching technique to form the poly-Si NW channel of transistors, and the whole device structures can be formed by a simple and low-cost fabr...
| Main Authors: | , |
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| Format: | Others |
| Language: | en_US |
| Published: |
2011
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| Online Access: | http://ndltd.ncl.edu.tw/handle/00509486531370150994 |