MEMS-Based High G Smart Sensor

• Main Authors: Wang, Yu Ping, 王玉平
• Other Authors: Hsu, Ray Quen
• Format: Others
• Language: zh-TW
• Published: 2011
• Online Access: http://ndltd.ncl.edu.tw/handle/11820354433527434462

博士 === 國立交通大學 === 機械工程學系 === 99 === Intelligent weapons provide a real-time estimation of a medium as the weapon is penetrating through hard object. Input signals are provided by an accelerometer used as a primary sensor. The purpose is to provide for detonation at the proper point as the high-speed penetrator passes through various layers of the object. Most conventional G sensors use cantilever beams or axial springs as triggering devices. The reaction time of these conventional G sensors are often far too long. In many high G (＞300G) applications, they completely fail to function. In this study, we proposed a MEMS-based high G smart sensor, which not only functions at a very high G impact but also identifies the material when a projectile makes an impact on a hard object. This high G smart sensor is intended for use at 3,000–21,000G. The sensor was made of silicon and the triggering mechanism involves a cantilever and a spring structure. The mechanical sensitivity of the sensors can be adjusted to pre-set the triggering G value. Four sensors, each designated to trigger its own G value were integrated in a unit. Experiments demonstrated that this unit can identify the characteristics of an object.