| Summary: | 碩士 === 國立交通大學 === 工學院碩士在職專班產業安全與防災組 === 99 === A procedure is there are a lot of hidden hazard,including physical and chemical hazard, while working in confined space such as chemical tank and digestion tank in semiconductor foundry. In this study, in order to prevent the confined space accident, we collect the overall process which is related to chemical hazard in semiconductor confined space; then define the higher risk factor by FMEA (Failure mode and Effects Analysis) in these processes, and finally propose the strategy for these risk control and management.Base on the study, there are total 63 chemical hazard process in semiconductor foundry confined space, and we sort out the process with higher probability including water recycle system; acid recycle system; acid/alkaline mixed recycle system, and the most populate hazard process is HF recycle system. Another study focus on the process with more serious hazard including ultrapure water system; water recycle system; acid recycle system; HF recycle system; acidic gas process system; exhausted HF3 gas process system. These kinds of process cause immediate injury to people and environment. At the end of the study, we propose the stand operation procedure; operating with proper protective equipment and regular training course to avoid the accident.
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