Study of the Mold for the Glass-Based Micro-Fluidics Biochips using UV Laser Processing System

• Main Authors: Yu-Sheng Chen, 陳瑜勝
• Other Authors: Ming-Fei Chen
• Format: Others
• Language: zh-TW
• Published: 2011
• Online Access: http://ndltd.ncl.edu.tw/handle/39yudv

碩士 === 國立彰化師範大學 === 機電工程學系 === 99 === Abstract In this thesis, the glassy carbon (GC) material was used to mold substrate. GC material have the advanced of high compressive strength, hardness, and temperature. Hence, the substrates could remove directly by using UV laser direct writing technique and without debris on the surface and bottom of the substrates. In this studied, the UV laser has adopts to fabricate micro-channels mold, then using the hot-embossing to fabrication micro fluidic bio-chips. The relationship between remove rate of GC mold and laser parameters testing such as: (1) laser power, (2) scan speed, and (3) laser frequency were discussed, then obtain optimization laser remove rate. The designed micro-channel with width is 150μm. The surface morphologies (width and depth of micro-channels) and surface roughness were measured by three dimensional confocal laser-scanning microscope. The experimental results indicated that the width of 120 μm, depth of 180 μm, and surface roughness of 0.672 μm of the micro-channels mold by using laser direct writing. In addition, the bio-chips had been fabricated with width of 119.93 μm, depth of 179.50 μm, and surface roughness of 0.350 μm after hot-embossing of soda-lime glass. The GC mold was successfully used to hot-embossing of glass substrates, the experimental conditions could be applied to relative research. In the further, could be achieve mass-production and low cost of micro fluidic bio-chips.