Characterization of Zinc Oxide Thin Film Prepared by Chemical Bath Deposition

• Main Authors: Pin-Yu Lin, 林品妤
• Other Authors: Yu-Shyan Lin
• Format: Others
• Language: zh-TW
• Published: 2011
• Online Access: http://ndltd.ncl.edu.tw/handle/30488012591601569685

碩士 === 國立東華大學 === 材料科學與工程學系 === 99 === In this thesis, ZnO films are deposited on Corning glasses by chemical bath deposition(CBD). The chemical bath deposition is a conventional and low cost technique. First, the ZnO films are grown with various growth parameters. Then the films are analyzed by scanning electron microscope (SEM), energy dispersive spectrometer (EDS), x-ray diffraction (XRD), UV/VIS spectrophotometer. A Hall measurement is performed on the sample to determine the sheet resistance, carrier mobility and carrier concentration. The best growth conditions are achieved after several experiments. These experimental results are analyzed and discussed.