Multi-layer pattern manufactured by femto-second laser-induced forward transfer technique

• Main Authors: Zhong Hao Lu, 呂中豪
• Other Authors: Din-Ping Tsai
• Format: Others
• Language: zh-TW
• Published: 2011
• Online Access: http://ndltd.ncl.edu.tw/handle/41256990848416352458

碩士 === 國立臺灣大學 === 應用物理所 === 99 === Laser-induced forward transfer (LIFT) is a simple fast one-step process technology, which utilizes short laser pulse to selectively remove the thin film (donor) material from a transparent support substrate and eventually forward transfer it onto a receiver substrate. We utilize LIFT to print the pattern of multi-layer thin film consisted of stacked gold and dielectric material and chalcogenide material dynamic release layer on glass substrate. The manufacture of three layers pattern by LIFT technique has been demonstrated. The proposed method has potential for manufacturing a large number of three-dimension structure on any substrate in metamaterails or other plasmonic applications faster and easier.