The parallel anodizing treatment technology for processing equipment components of large-size TFT-LCDs

• Main Authors: Ho-Mi Ku, 古和秘
• Other Authors: 莊賦祥
• Format: Others
• Language: zh-TW
• Published: 2011
• Online Access: http://ndltd.ncl.edu.tw/handle/2fy229

碩士 === 國立虎尾科技大學 === 光電與材料科技研究所 === 99 === Abstract For liquid crystal displays (LCDs), the demand of large-size panels in the market currently increases day by day. Therefore, the sizes for processing equipment components of most TFT-LCD manufacturers must be raised such as susceptor, shadow frame, ext. frame, diffuser process kit, backing plate, etc., resulting in that there are some challenges of technique and equipment cost for the present “vertical anode treatment technology”. In this thesis, we have studied the parallel thin film treatment technology of anode surface for optoelectronic equipment components of TFT-LCD manufacturers. Firstly, the experimental parameters have been estimated with the fabrication of simulating experimental tank by the similar figures’ theory, the plan for fluid fields of electroplating fluids, literature analysis, and expert conferences, developing the analysis technology of Taguchi method for quality engineering and their concept of experimental design. The analysis of experimental data can not only modulate the experimental parameters but also evaluate the stabilities of processes. This study focuses on the parallel tank and we have investigated the dependence of pipe diameter, pump pressure, dip height, and liquid height upon the film thickness of anode with the analysis technology of processing parameters and the measurement technology of physical properties. The experimental results manifest that the film thickness of anode closely approaches the setting average value under the same experimental conditions while the pipe diameter, pump pressure, dip height, and liquid height are 1.5 inch, 3 MPa, 60 cm, and 90 cm, respectively. With this study, we hope to solve the current difficulties for the anode treatment of large-size recycled aluminum alloys, lower the processing cost, and enhance the processing stabilities as well as performances of products. Keywords: Anodizing；Taguchi Methods