Development of a Multi-Degrees-of-Freedom Laser Encoder for Error Verification of the Machine Tools
碩士 === 國立虎尾科技大學 === 光電與材料科技研究所 === 99 === The multi-degrees-of-freedom laser encoder developed in this paper uses a reflection diffraction grating as a transformed medium to deliver the motion error signals of a linear stage. Based on the diffraction principle, the Doppler princilple, and the opti...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2011
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| Online Access: | http://ndltd.ncl.edu.tw/handle/66af28 |