Automatic Classification of Defect Pattern on Wafer－An application of Support Vector Machine

Automatic Classification of Defect Pattern on Wafer－An application of Support Vector Machine

碩士 === 國立虎尾科技大學 === 資訊管理研究所在職專班 === 99 === In the particle inspection process of semiconductor industrial, inspectors always require much time to review the pattern of the defect by their eyes. They can further discover the abnormal situations and the reasons, which can be eliminated to decrease...

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Bibliographic Details
Main Authors:	Yi-Hsiang Chen, 陳詣享
Other Authors:	胡念祖
Format:	Others
Language:	zh-TW
Published:	2011
Online Access:	http://ndltd.ncl.edu.tw/handle/86ey35

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