Fabrication of Lithium Niobate Microring Devices using Ultrasound-aided-Etching
碩士 === 國立臺北科技大學 === 光電工程系研究所 === 99 === Currently, the main methods in fabrication of lithium niobate micro-ring resonators are crystal ion-slicing method, etching after ion implantation method, proton exchange after the wet etching, etc. In these methods, the former two need to use ion implantation...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2011
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| Online Access: | http://ndltd.ncl.edu.tw/handle/dpb8za |