Recovery of Glycol Solution from Silicon Slurry Waste
碩士 === 國立臺北科技大學 === 資源工程研究所 === 99 === In silicon wafer manufacturing, a large amount of slurry waste is produced and feedstock is wasted during cutting process, resulting in environmental pollution and high cost. Recycling glycol solution is regarded as an important method to reduce the waste and c...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2011
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| Online Access: | http://ndltd.ncl.edu.tw/handle/9az8pj |