The research of CMOS-MEMS Micro-hotplate applied to carbon monoxide sensors
碩士 === 國立臺北科技大學 === 製造科技研究所 === 99 === This thesis presents the process of fully CMOS(complementary metal oxide semiconductor)-compatible with microhotplate, it apply gas-dry-etching on silicon substrate for anisotropic etching and intergrated on carbon monoxide(CO) sensor. Compare to the microhotpl...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2011
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| Online Access: | http://ndltd.ncl.edu.tw/handle/34m83f |