Study on Micro Spherical Probes Gluing and Fabrication for Micro Coordinate Measuring Machine

• Main Authors: Jia-Ke Huang, 黃家科
• Other Authors: Dong-Yea Sheu
• Format: Others
• Language: zh-TW
• Published: 2011
• Online Access: http://ndltd.ncl.edu.tw/handle/c297nr

碩士 === 國立臺北科技大學 === 製造科技研究所 === 99 === This paper describes fabricating technology to produce micro ball-ended spherical stylus tips for micro CMM’s tactile probing head. The study mainly used micro EDM method to glue and assemble micro glass spherical stylus tips. With combination of Wire Electro Discharge Grinding (WEDG) technology and position controlling function of CNC micro EDM, a micro ball-ended stylus could be assembled onto the front-top of micro electrode tool successfully. CCD in-process measurement was used to measure the profile and roundness of the styli tips. In order to investigate the fabrication characteristics, the study also used One Pulse Electric Discharge (OPED) technology to fabricate metal micro spherical stylus tips. The experimental results show that the roundness of the largest profile micro glass ball-ended stylus tips with diameter 0.07μm is as small as 2μm and adhesive force decreases rapidly at approximately 10.5mN. With the improvement of positional control technology and adhesive material, the gluing and assembling process of micro ball-ended stylus tips could be used on micro CMM’s tactile probing head for micro components metrology in the near future.