Application of PECVD and Post Treatment on Resistance and Mass Type Chemical Sensor Devices

博士 === 大同大學 === 材料工程學系(所) === 99 === Because of technology improvement and life convenience, people begin to require better life quality and security. When living is getting more convenient, people commence to figure out how to improve life quality; therefore, there are some technical developments o...

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Bibliographic Details
Main Authors: Shu-Chuan Liao, 廖淑娟
Other Authors: Ko-Shao Chen
Format: Others
Language:en_US
Published: 2011
Online Access:http://ndltd.ncl.edu.tw/handle/76726391685011581536