Application of PECVD and Post Treatment on Resistance and Mass Type Chemical Sensor Devices
博士 === 大同大學 === 材料工程學系(所) === 99 === Because of technology improvement and life convenience, people begin to require better life quality and security. When living is getting more convenient, people commence to figure out how to improve life quality; therefore, there are some technical developments o...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | en_US |
Published: |
2011
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Online Access: | http://ndltd.ncl.edu.tw/handle/76726391685011581536 |