| Summary: | 碩士 === 義守大學 === 生物技術與化學工程研究所 === 100 === In the thesis, 60nm MCM-41 nanoparticles was synthesized, and their thin films were prepared by our self-design spray coating system. Investigated the effects of the operating parameters such as the temperature of substrate,the flow rate of the vaporized droplets containing the zeolite nanoparticles and deposition time could prepared the high quality films. The crystalline,surface morphology,and the chemical composition of prepared samples would performed by the IR, XRD, BET, TGA, SEM, TEM, NMR, Contact Angle Meter. and so on.
According to the spin-coating method, after a zeolite suspension is spin-coated on a substrate, the substrate is heated at a high temperature to remove the templating agent and the solvent to form a highly porous zeolite thin film. However, the high temperature heating process, not only consumes energy, it easily induces cracks and damages on the surface of the thin film.
The thesis and simultaneously remove the template at low temperature during deposited process. Obviously ,The advantages of our systems is more conventional approach in forming a low dielectric constant material with the requirements of green chemistry and simple process.
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