CBR Application in Defect Monitoring Equipment Repairing - K Company as Case Study

• Main Authors: Cheng-HanChen, 陳正翰
• Other Authors: Tse-Sheng Chen
• Format: Others
• Language: zh-TW
• Published: 2012
• Online Access: http://ndltd.ncl.edu.tw/handle/46987171920046389507

碩士 === 國立成功大學 === 工學院工程管理碩士在職專班 === 100 === Vacuum tube technology has been substituted by Integrated Circuit（IC）which becomes an important part of the system design since 1950. According to the Moore’s law” The IC density of a chip will be double but the average selling price remains”. It means that the technology keeps on improving to the most advanced 28nm device as the mass production for a manufactory. Meanwhile, the process monitoring and controlling become more and more important, since they are the fundamental procedure of yield. Therefore, more accuracy and more sensitive tools are the demand of each manufacturing node for technology improvement. To achieve the demand of process controlling, more advanced hardware technology has been implemented in new tools. The improvement of technology becomes a big challenge to engineers because they need to repair the faulted machines. They have to learn more repairing technologies to troubleshoot the modern semiconductor machines. Thus, a strict training will be needed to meet the job requirements. However, the producing time for the semiconductor industry is very important. The shorter repairing time indicates the better productivity for the manufacturer. Therefore, it will be useful to keep the expert’s experience and build a knowledge based system for repairing references. Thus, the production performance will be improved due to the shorter machine down time. The objective of this study is developing and building a diagnostic and repairing system for a defect monitoring tool in semiconductor field by case-based reasoning (CBR) approach. Many cases are analyzed and discussed by experts. Finally, a CBR system has been constructed with the TEAMATES software for engineer’s application. After the system has been set up, the senior engineers can easily troubleshoot the faulted machines and it also can be used as an advanced course for junior engineers after they finish the basic trainings. As a result, this system will help our engineers to reduce the machine down time and increase the productivity of a semiconductor foundry.