Study of Indium Tin Oxide Optoelectronic Characteristics and Ohmic Contact with p-GaN by Magnetron Sputtering
碩士 === 國立成功大學 === 光電科學與工程學系 === 100 === In this experiment, transparent and conductive indium tin oxide (ITO) film were deposited on p-GaN and sapphire by the rf magnetron sputter system. Investigation of ohmic contact between ITO on p-type GaN determined by the transmission line model (TLM), and d...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2012
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Online Access: | http://ndltd.ncl.edu.tw/handle/14483447108912394763 |