| Summary: | 碩士 === 國立暨南國際大學 === 電機工程學系 === 100 === In this thesis, the characterizations of OTFTs with 3-D multiple nano channels were studied. The nano channels were fabricated using nanoimprint lithography and reactive ion etching. To improve the preferred orientation of pentacene, the self-assembled layer was used for the SiO2 and HfO2 dielectrics. The pentacene and S/D electrode were deposited by thermal evaporation. The surface morphologies and cross-sections of samples were investigated by AFM and SEM. The device performances were studied by HP-4156 and HP-4294.
In our results, from the SEM images, the nano channels with various line/space ratios were fabricated successfully. In the AFM images, the preferred orientations of pentacene were improved with the line/space ratio of about 1/2. Besides, the OTFTs on the nano channels with the line/space ratio of about 1/2 and line/space of about 600/1200 nm show the best performance among all samples. The proposed process will be suitable for the future flexible electronics applications.
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