Silicon Nanowire Field-Effect Transistor Based Biosensing Platform

博士 === 國立交通大學 === 生物科技學系 === 100 === Real-time surveillance of the biomarker is critical for improvements in illness management and is especially important for early detection, rapid intervention, and a possible reduction of the disease occurrence. Enhanced surveillance requires rapid, robust, and i...

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Bibliographic Details
Main Authors: Lin, Chih-Heng, 林志衡
Other Authors: Yang, Yuh-Shyong
Format: Others
Language:en_US
Published: 2012
Online Access:http://ndltd.ncl.edu.tw/handle/44441103558445344256
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Summary:博士 === 國立交通大學 === 生物科技學系 === 100 === Real-time surveillance of the biomarker is critical for improvements in illness management and is especially important for early detection, rapid intervention, and a possible reduction of the disease occurrence. Enhanced surveillance requires rapid, robust, and inexpensive analytical techniques capable of providing a detailed analysis of biological molecules. A simple and low-cost method to fabricate poly-crystalline silicon nanowire field-effect transistor (poly-SiNW FET) for bio-sensing application was demonstrated. The poly-silicon nanowire (poly-SiNW) channel was fabricated by employing the poly-silicon (poly-Si) sidewall spacer technique, which approach was comparable with current commercial semiconductor process and forsaken expensive electron beam (E-beam) lithography tools for large-scale production. The electronic properties of the poly-SiNW FET in aqueous solution were found to be similar to those of single-crystal SiNW FETs reported in the literature. Functionalized poly-SiNW FETs were used as the biosensors for specific and ultrasensitive detection of neurotransmitter dopamine and high pathogenic avian influenza virus DNA in this study. Specific electric changes were observed for dopamine and DNA sensing when nanowire surface of poly-SiNW FETs was modified with specific recognition capturers and those biological molecules at fM to pM range could be distinguished. We further demonstrated that specific detection, confirmation and recovery of DNA probe on the nanowire surface could be achieved with SiNW-FETs using hemagglutinin DNA as the diagnostic target. With its characteristics (ultrasensitive, label-free, and real-time detection) and advantages (potential for mass commercial production and integration with microfluidic system and circuit), poly-SiNW FET can be developed to become a portable biosensor for field use and point-of-care diagnoses.