Edge-Emitting Micro-Cavity Lasers with Deeply-Etched Distributed Bragg Reflectors
碩士 === 國立交通大學 === 電子研究所 === 100 === We report the fabrication of InGaAs quantum wells and InAs quantum dots edge emitting laser diodes with deep-etched Distributed Bragg Reflectors (DBR), which were patterned by e-beam lithography and etched by inductivity coupled plasma. By using DBR, a low loss mi...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2011
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| Online Access: | http://ndltd.ncl.edu.tw/handle/90308386422741779628 |