Investigation on plasma treatment in transparent Al-Zn-Sn-O thin film transistor application
碩士 === 國立交通大學 === 光電工程學系 === 100 === Recently, the thin film transistors (TFTs) with a-IGZO thin film as active layer perform higher mobility and better reliability than conventional hydrogenated amorphous silicon TFT (a-Si: H TFT). In addition, the uniformity of a-IGZO TFT is also superior...
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| Format: | Others |
| Language: | en_US |
| Published: |
2012
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| Online Access: | http://ndltd.ncl.edu.tw/handle/10586492221110426967 |