| Summary: | 碩士 === 國立屏東科技大學 === 環境工程與科學系所 === 100 === Optoelectronics industry has developed rapidly in recent years in Taiwan. Higher capacity emitted higher concentrations of acetic acid, nitric acid and NOx gases to Atmosphere. The yellow-brown smoke from stack ruined corporate image and influence the health of surrounding residents.
Texturing, PECVD, and the reflective layer coating processes are the main sources of NOx generated.
Photovoltaics factory commonly used the scrubber to treat exhaust gas. Usually, the inlet NOx concentrations was 329 ~ 382ppm. Due to the ineffectiveness, the yellow-brown gas could be seen from the stack, the emission concentration of NO2 measured still had high value of 50 ~ 70ppm . The removal efficiency had only 72%.
The redistribution of duct arrangement, addition of another regenerative acid scrubber, and replacement of different chemical reagent had been used to solve this perplexed problem. After three tries, the removal efficiency of 89% could be attained and the exhaust NOx concentration was decreased to 15 ~ 37 ppm, only light yellow smoke could be seen.For monthly production capacity of 40 ~ 50MW, the new daily operating cost of acid gases removal system were dropped to 3372 NTD, compared with the original 6525 NTD.
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